Array of low stress silicon nitride coupled oscillators with gold actuation leads. 1,100x Cornell Nanoscale Facility and Department of Applied Physics, USA
Released cantilevers after thermal annealing Universite Catholique de Louvain
MEMS Based Resonant Device Cornell Nanoscale Facility and Department of Applied Physics, USA
Resonator VTT Technologies, Finland
Date: May 18-19, 2024
Location: Yancheng Guest House (No.1 Tianshan Road), Tinghu District, Yancheng City, China